Y. P. Kong, H. Y. Low, S. W. Pang, and A. F. Yee, Duo-mold imprinting of three-dimensional polymeric structures, Journal Of Vacuum Science & Technology B 22 (6), 3251 (2004).
The publication above describes the process of making three dimensional nanostructures in detail and provides some examples that can be made. In a way, this process allows one to handle the the three dimensional nanostructures as it goes through several other processes. One criticism of this process is alignment, which is now limited to the sub-micrometer scale, but we are confident that with many researchers working on nanoscale alignment, it will no longer be a limitation soon.
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